Investigation on Microstructure and Optical Property of Nanocrystalline Silicon Thin Film

Authors

  • Li-Qiang Guo Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China
  • Jian-Ning Ding Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China
  • Guang-Gui Cheng Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China
  • Zhi-Yong Ling Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China
  • Zhong-Qiang Zhang Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

DOI:

https://doi.org/10.6000/2369-3355.2014.01.02.3

Keywords:

PECVD, process conditions, optical property, microstructure.

Abstract

Nanocrystalline silicon (nc-Si:H) thin films were deposited by capacitive coupled radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) system with direct current (DC) bias applied. Raman, XRD and ultraviolet-visible transmission spectra were employed to investigate their microstructure and optical properties, respectively. Both the crystalline volume fraction and the average crystalline size increase with the substrate temperature. With the increase of silane concentration, the crystalline volume fraction increases, while the average crystalline size decreases. With the increase of the radio frequency (RF) power or the DC negative bias voltage, the crystalline volume fraction and the average crystalline size increase firstly, then decreases. Finally, the optical band gaps were discussed in detail.

Author Biographies

Li-Qiang Guo, Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

Micro/Nano Science & Technology Center

Jian-Ning Ding, Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

Micro/Nano Science & Technology Center

Guang-Gui Cheng, Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

Micro/Nano Science & Technology Center

Zhi-Yong Ling, Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

Micro/Nano Science & Technology Center

Zhong-Qiang Zhang, Micro/Nano Science & Technology Center, Jiangsu University, 212013, Zhenjiang, China

Micro/Nano Science & Technology Center

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Published

2014-11-29

How to Cite

Guo, L.-Q., Ding, J.-N., Cheng, G.-G., Ling, Z.-Y., & Zhang, Z.-Q. (2014). Investigation on Microstructure and Optical Property of Nanocrystalline Silicon Thin Film. Journal of Coating Science and Technology, 1(2), 111–116. https://doi.org/10.6000/2369-3355.2014.01.02.3

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